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Public Downloads

You can download actual Flyers for our Software BEAMER, LAB, TRACER and  VIEWER  here

http://genisys-gmbh.com/web/assets/downloadInfos/GEN_Bro_BEAMER_8S_0813_K3.pdf

http://genisys-gmbh.com/web/assets/downloadInfos/GEN_Bro_LAB_8S_0813_DINA4_K2.pdf

http://genisys-gmbh.com/web/assets/downloadInfos/GEN_Bro_TRACER_2S_0813_K2.pdf

http://genisys-gmbh.com/web/assets/downloadInfos/Viewer_201209.pdf

 

SUSS Report 01/2012. See common papers of SUSS MicroTec and GenISys on page 8 till 11 and Page 12 till 19 : SIMULATION FOR ADVANCED MASK ALIGHNER LITHOGRAPHY and  ADVANCED MASK ALIGNER LITHOGRAPHY (AMALITH).

http://www.suss.com/fileadmin/user_upload/suss_report/SUSS_Report_01_2012_Original_2248.pdf

SUSS Report 01/2013 - See on page 20 the article: 3D MASK TOPOGRAÜHY MASK ALIGNER LITHOGRAPHY SIMULATION - a common paper of SUSS MicroTec, Philips Research and GenISys.

http://www.suss.com/fileadmin/user_upload/suss_report/SUSSreport_V1_2013_web.pdf